| 摘要 |
PURPOSE: An apparatus and a method for chucking and dechucking a substrate are provided to implement a stable chucking or dechucking operation by including a chucking plate moving with a substrate together. CONSTITUTION: A base frame(20) is located on the lower part of a chucking plate(10). The base frame includes a floating unit(25) supporting the chucking plate. A fixing clamp is formed on the upper part of the base frame to fix the chucking plate. A plate align device(40) controls the position of a substrate(S). The plate align device is composed of a moving body(41) moving horizontally, a linear driving device(43) moving the moving body and an align arm(45) moving the chucking plate. A lift pin unit(60) is formed on the base frame to vertically move the substrate from the chucking plate. |
