| 摘要 |
<P>PROBLEM TO BE SOLVED: To accelerate an exposure speed by using a spatial light modulation means with a fast response speed and having an ultraviolet ray resistance, thereby reducing man-hours of exposure processes. <P>SOLUTION: An aligner includes: a stage 1 for placing and holding an object 6 to be exposed on the upper surface; a light source 2 which is arranged on the upper side of the stage 1 and emits light; a spatial light modulation means 3 where a plurality of light modulators, which are disposed between the stage 1 and the light source 2, and in which a pair of electrodes are arranged facing to the side parallel to the transverse direction of an elongated member consisting of an electro-optical crystal material, are two-dimensionally disposed at both ends thereof as light incident and emitting end surfaces of the light source 1, for exposing the object 6 to be exposed by optically modulating the transmitted light of each light modulator and generating a predetermined pattern; and a control means 5 for individually driving and controlling each light modulator of the spatial light modulation means 3. <P>COPYRIGHT: (C)2008,JPO&INPIT |
