发明名称 |
NANOPARTICLE DEPOSITION SYSTEMS |
摘要 |
<p>Nanoparticle deposition systems including one or more of: a hollow target of a material; at least one rotating magnet providing a magnetic field that controls movement of ions and crystallization of nanoparticles from released atoms; a nanoparticle collection device that collects crystallized nanoparticles on a substrate, wherein relative motion between the substrate and at least a target continuously expose new surface areas of the substrate to the crystallized nanoparticles; a hollow anode with a target at least partially inside the hollow anode; or a first nanoparticle source providing first nanoparticles of a first material and a second nanoparticle source providing second nanoparticles of a second material.</p> |
申请公布号 |
EP2663666(A2) |
申请公布日期 |
2013.11.20 |
申请号 |
EP20120734741 |
申请日期 |
2012.01.13 |
申请人 |
REGENTS OF THE UNIVERSITY OF MINNESOTA |
发明人 |
WANG, JIAN-PING;HE, SHIHAI |
分类号 |
C23C14/35;C23C14/16;C23C14/22 |
主分类号 |
C23C14/35 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|