发明名称 TEMPERATURE ADJUSTING DEVICE, AND IMPRINTING DEVICE USING SAME
摘要 <p>A temperature adjusting device that can heat and cool an object like a mold or a molding target uniformly and quickly, and an imprinting device using the same are provided. The temperature adjusting device is for adjusting a temperature of the object like a mold 100 or a molding target 200, and includes fluid supplying means 1 for supplying a fluid at a predetermined temperature from a plurality of supply openings 11, holding means 2 including a holding face 21 that holds the object, and a fluid receiving face 22 that receives the fluid supplied from the supply openings 11, a temperature adjusting housing 3 that constructs, together with the holding means 2, a temperature adjusting chamber 31 which retains thereinside the supply openings 11, and a discharging channel 4 that discharges the fluid in the temperature adjusting chamber 31.</p>
申请公布号 EP2664427(A1) 申请公布日期 2013.11.20
申请号 EP20110855493 申请日期 2011.07.20
申请人 SCIVAX CORPORATION 发明人 KAWAGUCHI, HIROSUKE;TANAKA, SATORU
分类号 B29C33/02;B29C33/42;B29C59/02;H01L21/027 主分类号 B29C33/02
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