| 摘要 |
<p>The present invention provides a method for forming a cured film of a positive type photosensitive polymer composition over a support, including: a coating step for coating the aforementioned support with the aforementioned positive type photosensitive polymer composition; an exposure step for selectively irradiating the aforementioned positive type photosensitive polymer composition with a chemical ray to achieve an exposure; a developing step for developing an exposed section of the aforementioned positive type photosensitive polymer composition with an alkaline developer solution; a rinsing process for rinsing the aforementioned developer solution off with a rinsing solution and removing the exposed section of the aforementioned positive type photosensitive polymer composition; and a curing step for heating the aforementioned positive type photosensitive polymer composition to form a cured film, wherein the aforementioned rinsing step includes a first rinsing step and a second rinsing step, the aforementioned first rinsing step including supplying the aforementioned rinsing solution while the aforementioned support is rotated at a circumferential velocity of equal to or lower than 0.53 m/s, and the aforementioned second rinsing step including supplying the rinsing solution while the aforementioned support is rotated at a circumferential velocity that is higher than the circumferential velocity of the aforementioned first rinsing step.</p> |
