发明名称 Method for the production of an electronic component and electronic component produced according to this method
摘要 The invention relates to an electronic component having a circuit integrated on a semiconductor substrate, and a heat-conducting connection of the substrate by soldering using a carrier serving as a heat sink, wherein the invention proposes depositing a first, thicker Au layer (23) in the conventional back-side metallization of the substrate, thereafter a barrier coating (24), and, as the last layer, a thinner, second Au layer (25), wherein the material of the barrier coating is selected such that the barrier coating prevents the penetration by means of a diffusion barrier of Sn or AuSn from a liquid Au-Sn phase in the region of the second Au layer into the first Au layer (23) during the soldering process. The layer sequence of the back-side metallization is also deposited in the pass-through openings of the substrate, wherein the surface of the second Au layer comprises a reduced coatablity for the solder material due to the material diffused out of the barrier coating.
申请公布号 US8586418(B2) 申请公布日期 2013.11.19
申请号 US201013392375 申请日期 2010.09.20
申请人 BEHAMMER DAG;STIEGLAUER HERMANN;UNITED MONOLITHIC SEMICONDUCTORS GMBH 发明人 BEHAMMER DAG;STIEGLAUER HERMANN
分类号 H01L23/34 主分类号 H01L23/34
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