发明名称 |
Rapid detection of imminent failure in optical thermal processing of a substrate |
摘要 |
A system for thermal processing of a substrate includes a source of radiation, optics disposed between the source and the substrate to receive light from the source of radiation at the optics proximate end, and a housing holding the optics and having a void inside the housing isolated from light emitted from the source. A light detector is disposed within the void in the housing to detect light from the optics emitted into the housing and send a deterioration signal. The system further includes a power supply for the source of radiation, and a controller to control the power supply based on the deterioration signal from the light detector.
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申请公布号 |
US8586893(B2) |
申请公布日期 |
2013.11.19 |
申请号 |
US20080075798 |
申请日期 |
2008.03.12 |
申请人 |
ADAMS BRUCE E.;JENNINGS DEAN;HUNTER AARON MUIR;MAYUR ABHILASH J.;PARIHAR VIJAY;APPLIED MATERIALS, INC. |
发明人 |
ADAMS BRUCE E.;JENNINGS DEAN;HUNTER AARON MUIR;MAYUR ABHILASH J.;PARIHAR VIJAY |
分类号 |
B23K26/04;B23K26/03;B23K26/42 |
主分类号 |
B23K26/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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