| 摘要 |
Provided is a mobile type exhauster for a semiconductor production apparatus. Wheels are installed in the lower part of a closure to effectively remove polluting gas without leaking to the outside and easily move towards a chamber. An exhaust pump is installed in the closure. A suction pipe forms a suction path and is connected to the exhaust pump on one end thereof. A discharge pipe forms a discharge path and is connected to the exhaust pump on one end thereof. A suction hood is formed around the opening part of the chamber and connected to the other end of the suction pipe. |
