发明名称 |
Optical-component fabricating method and optical-component fabricating apparatus |
摘要 |
An optical-component fabricating method includes arranging a mask that has both an optical component pattern and an alignment mark pattern and a wafer that is developed through the mask at predetermined positions; exposing the optical component pattern and the alignment mark pattern onto the wafer; developing the alignment mark pattern that is exposed on the wafer; observing a position of the developed alignment mark pattern and moving the wafer in accordance with the position; repeating the exposing, the developing, and the moving a predetermined number of times; developing all the optical component patterns on the wafer; and etching the developed optical component patterns.
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申请公布号 |
US8587782(B2) |
申请公布日期 |
2013.11.19 |
申请号 |
US201213398073 |
申请日期 |
2012.02.16 |
申请人 |
KAI SATOSHI;FUJITSU LIMITED |
发明人 |
KAI SATOSHI |
分类号 |
G01B11/00;G03C5/00;G03F9/00 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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