发明名称 Method and apparatus for lifting a horizontally-oriented substrate from a cassette
摘要 A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.
申请公布号 US8585115(B2) 申请公布日期 2013.11.19
申请号 US201113268129 申请日期 2011.10.07
申请人 FAIRHURST JOHN ROBERT;KRAMPERT JEFFREY E.;HERTEL RICHARD J.;MUKA RICHARD;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 发明人 FAIRHURST JOHN ROBERT;KRAMPERT JEFFREY E.;HERTEL RICHARD J.;MUKA RICHARD
分类号 B66F19/00 主分类号 B66F19/00
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