发明名称 |
Method and apparatus for lifting a horizontally-oriented substrate from a cassette |
摘要 |
A system and method are disclosed for removing horizontally oriented substrates from a cassette. A substrate lifter has an engagement end for engaging a substrate and an adjustment end for engaging an adjustment assembly. The engagement end includes a recess having first and second arcuate sidewalls configured to engage an OD of the substrate, and a circular protrusion positioned between the first and second arcuate sidewalls. The circular protrusion allows lateral movement of the substrate up to a predetermined amount and prevents lateral movement of the substrate in excess of the predetermined amount. Other embodiments are described and claimed.
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申请公布号 |
US8585115(B2) |
申请公布日期 |
2013.11.19 |
申请号 |
US201113268129 |
申请日期 |
2011.10.07 |
申请人 |
FAIRHURST JOHN ROBERT;KRAMPERT JEFFREY E.;HERTEL RICHARD J.;MUKA RICHARD;VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
FAIRHURST JOHN ROBERT;KRAMPERT JEFFREY E.;HERTEL RICHARD J.;MUKA RICHARD |
分类号 |
B66F19/00 |
主分类号 |
B66F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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