STABILIZATION METHOD AND EQUIPMENT OF FOCAL PLANE IN MICROSCOPY BY USING REMOTE FOCUSING AND ASYMETRIC POINT SPREAD FUNCTION DEFORMATION

摘要

The present invention relates to a focal surface stabilizing device of a microscope using a long distance focusing method and the non-linear transformation of a point spread function and a method thereof which is one method for stabilizing a focal surface at a nanometer scale. The microscope focal stabilizing method includes a step of bring a reference light source into focus on a cover glass surface; a step of transforming the point spread function of the reference light source into a non-linear shape; and a step of calculating a focal function of the reference light source. [Reference numerals] (110) Step of focusing a reference light source on a cover glass surface;(120) Step of converting the point spread function of the reference light source into a non-linear shape;(130) Step of calculating the focus function of the reference light source;(140) Step of controlling feedbacks;(AA) Start;(BB) End