| 发明名称 |
Treatment of polishing pad window |
| 摘要 |
A window of solid light-transmissive polymer is formed in a polishing pad, and at least one surface of the window is treated to increase the smoothness of the at least one surface. Treating the surface of the window can include heating the at least one surface and pressing with a solid rigid part.
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| 申请公布号 |
US8585790(B2) |
申请公布日期 |
2013.11.19 |
| 申请号 |
US20100761334 |
申请日期 |
2010.04.15 |
| 申请人 |
SWEDEK BOGUSLAW A;BENVEGNU DOMINIC J;APPLIED MATERIALS, INC. |
发明人 |
SWEDEK BOGUSLAW A;BENVEGNU DOMINIC J |
| 分类号 |
B29C39/00;B29C59/00 |
主分类号 |
B29C39/00 |
| 代理机构 |
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| 主权项 |
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