| 摘要 |
PURPOSE: A halftone mask including a plurality of semi-permeable parts is provided to shorten manufacturing processes. CONSTITUTION: A halftone mask includes two or more semi-permeable parts(121,151). The two or more semi-permeable parts are formed by laminating the semipermeable materials(120,150) on a transparent substrate(110). The two or more semi-permeable part passes the irradiated light in different light transmittance. As moving towards the upper part from a contact surface of the transparent substrate, one or more oxygen concentration increases among the semi-permeable part. |
