| 摘要 |
PURPOSE: An automatic measuring system of a multi-sensor is provided to automatically process a probe pin inspection, an individual sensor inspection and electrical property measurement of a multi-sensor. CONSTITUTION: An automatic measuring system(100) of a multi-sensor comprises a voltage supply unit(110), a current and resistance measurement unit(120), a relay unit(130), a multiplexer unit(140), and a controller(150). The voltage supply unit supplies voltage for detection through a probe(52). The current and resistance measurement unit measures the current or resistance of individual sensors or individual probes. The relay unit switches on/off terminals of the individual sensors and individual probes when supplying voltage to a multi-sensor or receiving measurement signals from the multi-sensor. The multiplexer unit selects one among a plurality of the sensors in order to measure the current of the individual sensor while in the state that a voltage supply to the individual sensors is not cut off. The controller receives an input of a user, thereby controlling the voltage supply unit, the current and resistance measurement unit, the relay unit, and the multiplexer unit, or a controlling device of a probe station. [Reference numerals] (110) Voltage supply unit; (120) Current and resistance measuring unit; (130) Relay unit; (140) Multi-flexible unit; (150) Controller; (160) Semiconductor variable analyzer; (83) Probe chuck fixing arm controlling device; (85) Sensor transferring arm controlling device; (87) Cleaning pad transferring arm controlling device; (AA) PCB circuit |
