METHOD FOR MANUFACTURING MEMS PRESSURE SENSOR OF CAPACITIVE TYPE FOR MEASURING PULSE

摘要

Disclosed is a method for manufacturing a capacitive MEMS pressure sensor for a pulse diagnosis. The capacitive MEMS pressure sensor for the pulse diagnosis according to one embodiment of the present invention diagnoses a pulse by measuring an alpha wave in direct contact with the skin of the human. The durability of the capacitive MEMS pressure sensor for the pulse diagnosis is improved.