发明名称 METHOD OF DETERMINING A CHARACTERISTIC
摘要 A first target population and a second target population are etched into a substrate. The second target population has an asymmetry with respect to the first target population. This can allow the different target populations to be distinguished and characteristics of the different target populations determined.
申请公布号 KR101330116(B1) 申请公布日期 2013.11.15
申请号 KR20117017727 申请日期 2009.12.21
申请人 发明人
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
代理机构 代理人
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