| 摘要 |
The invention provides a three-dimensional shape measuring device. An upper contact (1a) is capable of scanning and measuring the upper part (7a) of a measured object (7) along XY directions through a pneumatic slide block 1 in a non-vibration manner and further measuring the Z coordinate with excellent precision by means of a first reflecting mirror (1b) and a lens (2de). A side contact (2ia) which can also move on the XY directions can not vibrate in the Z direction. Therefore, the side contact can scan and measuring the side surface (7b) of the measured object. The Z coordination measurement of the side contact (2ia) can be achieved by means of the Z coordinate measuring value of the first reflecting mirror (1b). The XY displacement of the side contact can be measured with high precision by means of an inclined angle measuring part (2j). |
