| 发明名称 |
TREATMENT SYSTEM FOR FLAT SUBSTRATES |
| 摘要 |
A plasma-coating assembly for flat surfaces has two electrodes with a mechanism that alters and regulates the distance between the electrodes. The second electrode holds a substrate for treatment and rotates in azimuth under control through an angle of between 0 and 45 degrees to the vertical. The rotation may be stopped at any point. |
| 申请公布号 |
HK1146153(A1) |
申请公布日期 |
2013.11.15 |
| 申请号 |
HK20100111670 |
申请日期 |
2010.12.15 |
| 申请人 |
LEYBOLD OPTICS GMBH |
发明人 |
GEISLER, MICHAEL;MERZ, THOMAS;ROEDER, MARIO;BECKMANN, RUDOLF |
| 分类号 |
H01J;C23C;H01L |
主分类号 |
H01J |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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