发明名称 SUBSTRATE BREAKING SYSTEM AND SUBSTRATE BREAKING METHOD
摘要 <p>The invention discloses a substrate breaking system and a substrate breaking method. According to the substrate breaking system and the substrate breaking method of the invention, a substrate is overturned while is automatically conveyed by a first mechanical arm and is automatically conveyed and overturned by a second mechanical arm and a overturning apparatus while is broken. Therefore, an effect of increasing productivity is achieved. In addition, by the first mechanical arm, the second mechanical arm, and the overturning apparatus, the substrate is conveyed and overturned while is broken. As a result, an effect of treating a substrate with large area is achieved.</p>
申请公布号 KR101329819(B1) 申请公布日期 2013.11.15
申请号 KR20120009835 申请日期 2012.01.31
申请人 发明人
分类号 C03B33/02;G02F1/13 主分类号 C03B33/02
代理机构 代理人
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