发明名称 DEFOAMING DEVICE OF SUBSTRATE
摘要 The present invention relates to an air defoamation device for a substrate. The air defoamation device for a substrate according to the present invention is provided to prevent the formation of an air trap caused by the inflow of air into a via hole formed on the substrate by vibrating the substrate by hitting or interfering a jig which is installed on an inlet of a treatment tank where the substrate is dipped and which clamps the substrate; to facilitate the optimization of processes by removing air remaining in the via hole; and to improve the reliability by solving a quality failure problem related to a task of coating the substrate based on the optimization.
申请公布号 KR20130124791(A) 申请公布日期 2013.11.15
申请号 KR20120048196 申请日期 2012.05.07
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 BAEK, HA WOON;LEE, HEE SEG
分类号 C25D5/00;H05K3/26 主分类号 C25D5/00
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