发明名称 Probe card
摘要 A probe card is provided to prevent a probe from being separated from a corresponding upper terminal by fixing and guiding the probe at the same time through not only a first guide fixing a plurality of probes but also a second guide guiding the location of a plurality of probes. A substrate(100) in which a plurality of terminals corresponding to a plurality of probes(300) are equipped is formed. A first guide(200) in which a plurality of fixing holes fixes a plurality of probes respectively is equipped is formed. A second guide(400) in which a plurality of guide holes guide a plurality of probes to a plurality of terminals respectively is positioned between a substrate and the first guide. The probe is fixed with the fixing hole of the first guide and is guided with the guide hole of the second guide and is electrically connected with the terminal.
申请公布号 KR101329814(B1) 申请公布日期 2013.11.15
申请号 KR20070074134 申请日期 2007.07.24
申请人 发明人
分类号 H01L21/66 主分类号 H01L21/66
代理机构 代理人
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