发明名称 CUTTING METHOD OF LAMINATION BODY AND MANUFACTURING METHOD OF RESIN SEALING ELECTRONIC COMPONENT
摘要 PROBLEM TO BE SOLVED: To provide a cutting method which efficiently cuts a lamination body, in which a resin layer is laminated on a substrate body formed by one of or both of a ceramic and a metal, at low costs, and to provide a manufacturing method of a resin sealing electronic component.SOLUTION: In a cutting method of this invention, a lamination body 10, in which a resin layer 12 is laminated on a substrate body 11 formed by at least one of a ceramic and a metal, is cut by a laser beam. The lamination body 10 further includes a laser beam absorbent material 13, and the laser beam absorbent material 13 is laminated on a surface of the resin layer 12 which is opposite to the substrate body 11. The laser beam is radiated to the laser beam absorbent material 13 thereby cutting the lamination body 10.
申请公布号 JP2013232604(A) 申请公布日期 2013.11.14
申请号 JP20120104991 申请日期 2012.05.01
申请人 TOWA CORP 发明人 URAGAMI HIROSHI;OKAMOTO JUN
分类号 H01L23/29;H01L21/56;H01L23/31;H01L33/48 主分类号 H01L23/29
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