| 摘要 |
PROBLEM TO BE SOLVED: To continuously, efficiently and stably clean a surface of two or more solar cell substrates.SOLUTION: A cleaning apparatus of solar cell substrates includes: a treatment tank that accommodates a treatment liquid to clean the solar cell substrate internally, to which a solar cell substrate is carried from one end side and from which the solar cell substrate is carried out from the other end side; a roller conveyer that carries the solar cell substrate into the treatment tank in a state where the solar cell substrate is placed thereon, and carries out the solar cell substrate of the treatment tank after carrying it in the treatment liquid in a state where the upper surface of the solar cell substrate is immersed in the treatment liquid; and a guide disposed above the roller conveyer so that only the end of the upper surface of the solar cell substrate comes into contact therewith when the solar cell substrate placed on the roller conveyer floats up from the roller conveyer. |
