发明名称 TEST DEVICE AND TEST SYSTEM OF SEMICONDUCTOR DEVICE AND TEST METHOD FOR TESTING SEMICONDUCTOR DEVICE
摘要 A test device of a semiconductor device for testing a semiconductor device including a plurality of interface pads includes a plurality of coupling units, each configured to be coupled to a corresponding one of the plurality of interface pads, a channel configured to be coupled to the plurality of coupling units, a voltage generating unit configured to generate a test voltage applied to the channel, and a current measuring unit configured to measure a current that flows on the channel in response to the test voltage.
申请公布号 US2013300450(A1) 申请公布日期 2013.11.14
申请号 US201213716527 申请日期 2012.12.17
申请人 SK HYNIX INC. 发明人 KWAK SUG-JUN
分类号 G01R31/04 主分类号 G01R31/04
代理机构 代理人
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