发明名称 |
FREQUENCY TUNABLE MICROMIRROR |
摘要 |
An optical imaging system having two micromirrors is disclosed. Each of the two micromirrors can be rotated by a first set of combdrive actuators along a first axis and a second set of combdrive actuators along a second axis. Each of the first and second set of combdrive actuators includes multiple stator comb fingers and multiple rotor comb fingers capable of rotating about a torsion bar. One of the micromirrors can be tuned by applying a current to the torsion bar to change the Young's modulus of the torsion bar via thermoelectrical heating of the torsion bar.
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申请公布号 |
US2013301095(A1) |
申请公布日期 |
2013.11.14 |
申请号 |
US201213466118 |
申请日期 |
2012.05.08 |
申请人 |
ZHANG XIAOJING;WANG YOUMIN;SHEN TING |
发明人 |
ZHANG XIAOJING;WANG YOUMIN;SHEN TING |
分类号 |
G02B26/10 |
主分类号 |
G02B26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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