MICROCHIP

摘要

PROBLEM TO BE SOLVED: To provide a microchip which is configured to achieve a high-efficiency vaporization operation inside the microchip.SOLUTION: A microchip is formed by sticking a top plate 4, a middle plate 3 and a base plate 2 to one another. The top plate 4 includes the introduction passage 8 and discharge passage 7 of a vapor phase and the introduction passage 8 and discharge passage 7 of a liquid phase. The base plate 2 includes a pool part 16 in which the liquid phase introduced through the introduction passage 8 is stored by a capillary action. The middle plate 3 includes a through-hole penetrating between the pool part 16 included in the base plate 2 and the top plate 4. The through-hole becomes an intra-chip space for forming a flow passage 14 of the vapor phase existing above the liquid phase stored in the pool part 16.