| 摘要 |
<p>A high-vacuum system comprising a vacuum chamber (12) and a high-vacuum chamber (14) is defined, having at least one vacuum pump (16), which is preferably connected to the vacuum chamber (12), and at least one high-vacuum pump (24), which is preferably connected to the high-vacuum chamber (14), wherein a valve (30) is disposed between the vacuum chamber (12) and the high-vacuum chamber (14). Such a construction enables the vacuum chamber (12) and the high-vacuum chamber (14) to be jointly evacuated with the aid of the vacuum chamber (16) before the high-vacuum chamber (14), with the valve (30) closed, is evacuated to high vacuum by means of a high-vacuum pump (24).</p> |
