IMAGE MEASURING DEVICE, IMAGE MEASURING METHOD, AND IMAGE MEASURING PROGRAM

摘要

PROBLEM TO BE SOLVED: To enable two-dimensional measurement with small error even if there is a difference between a measurement plane of a workpiece and a plane with calibrated external parameters.SOLUTION: When a workpiece 2 is held by a holding device 3, an image measurement device 1 calculates a difference between a calibrated plane 17 with calibrated external parameters and a measurement plane 20 of the workpiece 2. The image forming device 1 corrects the external parameters so that the calibrated plane 17 coincides with the measurement plane 20, to perform two-dimensional measurement on the workpiece 2 by use of the corrected external parameters.