| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermionic power generation element capable of achieving a high power generation output by concurrently providing reduction in the internal resistance of an emitter electrode and improvement of the performance of a thermionic discharge of the emitter electrode.SOLUTION: An emitter electrode 5 of the thermionic power generation element 1 is set so that a donor impurity concentration NH of an N-type first diamond layer 21 formed on an emitter substrate 13 that is a metal substrate is higher than a donor impurity concentration NE of an N-type second diamond layer 23 formed on the N-type first diamond layer 21. |
