SURFACE ACOUSTIC WAVE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a surface acoustic device which enables low height.SOLUTION: A surface acoustic device includes: a piezoelectric substrate; a comb-shaped electrode provided on a surface of the piezoelectric substrate; a wiring connected with the comb-shaped electrode; a side wall provided on the piezoelectric substrate and enclosing the comb-shaped electrode; and a top plate provided on the side wall and covering an excitation space of the comb-shaped electrode. A non conductor part is provided in the wiring, and columnar parts reaching from the piezoelectric substrate side to the top plate side are provided on the non conductor part at the inner side of the side wall so as to avoid contacting with the side wall.