发明名称 MEMS Inertial Sensor and Method of Inertial Sensing
摘要 The invention comprises an inertia! sensor comprising a frame, a proof mass; a first resonant element having a proximal end and a distal end, the first resonant element being fixed to the frame at its proximal end and coupled to the proof mass at its distal end, a second resonant element having a proximal end and a distal end, the second resonant element being fixed to the frame at its proximal end, adjacent to the first resonant element such that there is no coupling between the second resonant element and the proof mass, a means for coupling the first resonant element to the second resonant element; a drive means coupled to the first and second resonant elements for vibrating the first and second resonant elements; and a sensor assembly for detecting the amplitude of vibration of the resonant elements.
申请公布号 US2013298675(A1) 申请公布日期 2013.11.14
申请号 US201113700718 申请日期 2011.05.26
申请人 THIRUVENKATANATHAN PRADYUMNA;SESHIA ASHWIN;YAN JIZE;CAMBRIDGE ENTERPRISE LIMITED 发明人 THIRUVENKATANATHAN PRADYUMNA;SESHIA ASHWIN;YAN JIZE
分类号 G01C19/56;G01C19/5726;G01C19/5755;G01P15/097;G01P15/18 主分类号 G01C19/56
代理机构 代理人
主权项
地址