| 发明名称 |
Substrate Table, Lithographic Apparatus and Device Manufacturing Method |
| 摘要 |
A substrate table comprising a base and a plurality of burls that project from the base, wherein an upper surface of the burls is provided with a multilayer coating.
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| 申请公布号 |
US2013301028(A1) |
申请公布日期 |
2013.11.14 |
| 申请号 |
US201113979278 |
申请日期 |
2011.11.17 |
| 申请人 |
ALBERT BENSELY;COMPEN RENE THEODORUS, PETRUS;ASML NETHERLANDS B.V. |
发明人 |
ALBERT BENSELY;COMPEN RENE THEODORUS, PETRUS |
| 分类号 |
G03F7/20;C23C16/44;C23F1/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
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代理人 |
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