| 摘要 |
PROBLEM TO BE SOLVED: To provide a program update system for a semiconductor manufacturing apparatus, the update system updating a control program with an update program, which prevents version mismatch from occurring between control programs after update.SOLUTION: In a control program update system for a semiconductor manufacturing apparatus which provides an update program from a main controller, and updates a control program for a unit controller with the update program, the main controller has version combination data indicating a combination of version information on update programs required for the unit controllers, determines whether a combination of version information on update programs provided to the unit controllers matches version combination data, and if it is determined that a combination of version information on update programs provided to the unit controllers matches version combination data, provides update programs to the unit controllers. |
