发明名称 AIR PLATE FOR FLOATING
摘要 PROBLEM TO BE SOLVED: To provide an air plate for floating which can be manufactured easily, and can control the floating amount with high accuracy, by floating a transported matter such as glass with high rigidity.SOLUTION: An air plate 1 for floating includes a top plate 2 having a plurality of air ejection holes 2c and suction holes 2d penetrating from the upper surface 2a to the lower surface 2b and arranged alternately, in an upper surface view, with each air ejection hole having a counter boring part 2e on the lower surface side, an orifice sheet 3 having a plurality of orifices 3c penetrating from the upper surface 3a to the lower surface 3b at positions corresponding to the counter boring parts of the top plate, and communication holes 3d communicating, in one and one correspondence, with the suction holes of the top plate and penetrating from the upper surface to the lower surface, and bottom side plates 4, 5 having air supply routes 4c and air supply openings 5c bored in the orifice sheet and supplying air to all orifices, and air suction routes 4d and suction openings 5d for sucking air from all communication holes communicating with the suction holes.
申请公布号 JP2013232631(A) 申请公布日期 2013.11.14
申请号 JP20130055853 申请日期 2013.03.19
申请人 OILES IND CO LTD 发明人 TSUNODA KOICHI;ITO AKIHIKO;YASUDA TAKAHIRO;OZAWA HIDEO
分类号 H01L21/677;B23K26/00;B23K26/38;B65G49/06 主分类号 H01L21/677
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