发明名称 METHOD FOR INCREASING THE ELECTRICAL CONDUCTIVITY OF METAL OXIDE SEMICONDUCTOR LAYERS
摘要 <p>A method for increasing the electrical conductivity of a metal oxide semiconductor layer at predetermined locations, wherein the method comprises: providing a reducing agent in physical contact with the metal oxide semiconductor layer at the predetermined locations and inducing a chemical reduction reaction between the reducing agent and the metal oxide semiconductor layer, thereby affecting the chemical composition of the metal oxide semiconductor layer at the predetermined locations; and uses of the method.</p>
申请公布号 WO2013167374(A1) 申请公布日期 2013.11.14
申请号 WO2013EP58390 申请日期 2013.04.23
申请人 IMEC;NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK (TNO) 发明人 MUELLER, ROBERT
分类号 H01L29/66;H01L29/786 主分类号 H01L29/66
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