| 摘要 |
A gyro sensor includes a substrate, and a first function element, a second function element and a third function element which are arranged above the substrate. With respect to function elements next to each other of the first function element, the second function element and the third function element, the direction of vibration of a vibrating body of one function element is different from the direction of displacement of a movable body of the other function element, and the direction of displacement of a movable body of the one function element is different from the direction of vibration of a vibrating body of the other function element.
|
