发明名称 MULTI-BLOCK SPUTTERING TARGET WITH INTERFACE PORTIONS AND ASSOCIATED METHODS AND ARTICLES
摘要 A sputtering target that includes at least two consolidated blocks, each block' including an alloy including a first metai (e.g., a refractory metal such as molybdenum in an amount greater than about 30 percent by weight) and at least one additional alloying ingredient; and a joint between the at least two consolidated blocks:, the joint being prepared free of any microstructure derived from a diffusion bond of an added loose powder. A process for making the target includes hot isostatically pressing (e.g., below a temperature of 1080°C), consolidated preform blocks that, prior to pressing, have interposed between- the consolidated powder metal blocks at least one continuous solid interface portion. The at least one continuous solid interface portion may include a cold spray body, which may be a mass of cold spray deposited powders on a surface a block, a sintered preform,, a compacted powder body {e.g,, a tile), or any combination thereof.
申请公布号 WO2013169342(A1) 申请公布日期 2013.11.14
申请号 WO2013US30316 申请日期 2013.03.12
申请人 H.C. STARCK, INC. 发明人 ROZAK, GARY, ALAN;GAYDOS, MARK, A.;MICHALUK, CHRISTOPHER
分类号 C23C14/34;B22F3/15;C22C1/04 主分类号 C23C14/34
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