发明名称 MULTI-STACK CURE SYSTEM AND OPERATION METHOD OF THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a multi-stack cure system and an operation method of the multi-stack cure system.SOLUTION: A chamber having an input slot and an ejection slot is disposed. A magazine is attached into the chamber. A large number of substrates, in which sealing materials are formed, are loaded in the magazine. A heater is attached to the chamber. The heater plays a role for heating the large number of substrates in which the sealing materials are formed. A loading unit is disposed near the input slot. The loading unit includes a transfer device and a push bar. A substrate recognition device is attached to the loading unit. A control device is connected with the substrate recognition device. The input slot is larger than each of the large number of substrates in which the sealing materials are formed and is smaller than the magazine.
申请公布号 JP2013232638(A) 申请公布日期 2013.11.14
申请号 JP20130081002 申请日期 2013.04.09
申请人 SAMSUNG ELECTRONICS CO LTD 发明人 PARK JUNG-GYU
分类号 H01L21/56;H01L21/50 主分类号 H01L21/56
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