VARIABLE SPACING FOUR-POINT PROBE PIN DEVICE AND METHOD
摘要
A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.
申请公布号
WO2013169783(A1)
申请公布日期
2013.11.14
申请号
WO2013US39955
申请日期
2013.05.07
申请人
KLA-TENCOR CORPORATION
发明人
JOHNSON, WALTER H.;SHI, JIANOU;DONG, LANSHENG;PENG, HAIJING;LIU, XIANGHUA;JIN, KEVIN (JIAZHOU);ZHANG, ZHUOXIAN;ZHU, NANCHANG