| 摘要 |
<p>The present invention allows an electrostatic force to be effectively generated during a separating operation and allows a high separating force to be obtained with a simple configuration. This electrostatic actuator is equipped with: a fixed drive electrode (21) that is fixedly provided with respect to a silicon substrate (2); a movable drive electrode (22), the bottom surface of which being placed so as to face the fixed drive electrode (21), that approaches the fixed drive electrode (21) by means of an electrostatic force generated between the movable drive electrode and the fixed drive electrode (21); and a separation electrode (24) that faces the top surface of the movable drive electrode (22) and separates the movable drive electrode (22) from the fixed drive electrode (21) by means of an electrostatic force generated between the separation electrode and the movable drive electrode (22). The separation electrode (24) partially fixes the movable drive electrode (22), and the movable drive electrode (22) and the separation electrode (24) deform so as to open with respect to the part where the movable drive electrode (22) and the separation electrode (24) are fixed together in order to accommodate the movements of the movable drive electrode (22) closer to and away from the fixed drive electrode (21).</p> |
