| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape/position check sensor capable of checking the shape and position of a substrate.SOLUTION: A shape/position check sensor 150 includes a sheet-like piezoelectric body 151 having a pressure measurement region X1. The pressure measurement region includes a plurality of first sets of strip electrode arranged in a predetermined direction on one side of the sheet-like piezoelectric body, and a plurality of second sets of strip electrode arranged in a predetermined angular direction for the predetermined direction on the other side of the sheet-like piezoelectric body. In the sensor, the pressure measurement region is arranged to the shape of a sheet-like measurement object, and configured to check the shape or position of a sheet-like measurement object by measuring the voltage between a strip electrode of the first set and a strip electrode of the second set, and then measuring the pressure distribution in the pressure measurement region. |
