发明名称 FORM MEASURING APPARATUS, METHOD FOR MEASURING FORM, METHOD FOR MANUFACTURING STRUCTURE AND NON-TRANSITORY COMPUTER READABLE MEDIUM STORING A PROGRAM FOR SETTING MEASUREMENT AREA
摘要 There is provided a form measuring apparatus which is configured to perform measurement of a surface form of a surface of an object to be inspected having a three-dimensional shape, the form measuring apparatus including: a detecting section which performs detection of the surface form of the surface of the object having the three-dimensional form; and an area-setting section which sets, as a measurement area, an adjacent area adjacent to a designated area, based on form information of a form of the designated area.
申请公布号 US2013298415(A1) 申请公布日期 2013.11.14
申请号 US201313871203 申请日期 2013.04.26
申请人 NIKON CORPORATION;NIKON CORPORATION 发明人 KANTO KENTA
分类号 G01B5/008 主分类号 G01B5/008
代理机构 代理人
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