TEMPERATURE COMPENSATED FORCE SENSOR

摘要

A force sensor may include a housing having a cavity enclosing a sense die, an actuating element and an elastomeric seal. The sense die may have a force sensing element for sensing a force applied to a surface of the sense die, and a temperature compensation circuit. The temperature compensation circuit may be located on the surface of the sense die and may be configured to at least partially compensate for the temperature sensitivity of the force sensing element. The actuating element may extend outside the housing and be used to transfer a force applied externally from the housing to the sense die. The elastomeric seal may include one or more conductive elements separated from the edge of the elastomeric seal by an insulating elastomeric material.