发明名称 MEMORY DEVICE AND METHOD FOR MANUFACTURING MEMORY DEVICE
摘要 A memory device includes a substrate, first and second trench isolations, a plurality of line-type isolations, a first word line, and a second word line. The substrate comprises an active area that comprises source and drain regions. The first and second trench isolations extend parallel to each other. The plurality of line-type isolations define the active area together with the first and second trench isolations. The first word line extends across the active area. The first word line is formed in the substrate and adjacent to the first trench isolation. The first word line defines a first segment of the active area with the first trench isolation. The second word line extends across the active area. The second word line is formed in the substrate and adjacent to the second trench isolation. The second word line defines a second segment of the active area with the second trench isolation. The size of the first segment is substantially equal to the size of the second segment.
申请公布号 US2013302968(A1) 申请公布日期 2013.11.14
申请号 US201313946704 申请日期 2013.07.19
申请人 NANYA TECHNOLOGY CORPORATION 发明人 LIN SHIAN JYH;HUANG JEN JUI
分类号 H01L21/762 主分类号 H01L21/762
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