发明名称
摘要 Disclosed is an electronic device provided with IDT electrodes (2a, 2b) having a fine electrode line width (T), the IDT electrodes (2a, 2b) being made by conjugating carbon nanotubes (CNTs) (5) into a metal film (6). The CNTs (5) have an average diameter (D) that is at most one-fourth of the electrode line width (T) and an average length (L) that is at most 10 times the electrode line width (T). Also, the percentage by volume of CNTs (5) having a length equal to or less than the electrode line width (T) is 5-90vol% of the total amount of CNTs (5). Thus, it is possible to provide a highly-reliable electronic device with excellent electrical conductivity, excellent migration resistance and enhanced electric power resistance, even if the device has fine conductor patterns.
申请公布号 JP5339222(B2) 申请公布日期 2013.11.13
申请号 JP20110541882 申请日期 2010.11.05
申请人 发明人
分类号 H03H9/145;C01B31/02;H01L21/3205;H01L21/768;H01L23/532;H01L41/09;H01L41/18;H01L41/187;H01L41/22 主分类号 H03H9/145
代理机构 代理人
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