APPARATUS AND METHOD FOR SUPPLYING CHEMICAL SOLUTION BY USING SENSE

摘要

An apparatus for supplying a chemical solution includes at least one chemical solution storage tank storing a chemical solution and having a sensor for sensing the amount of a residual chemical solution; a chemical solution pump connected to the chemical solution tank and absorbing the chemical solution; a buffer tank connected to the chemical solution storage tank to store the chemical solution, discharging the stored chemical solution to a nozzle injecting the chemical solution onto a glass, and pumps the chemical solution according to the level of the chemical solution; and a control part sensing the amount of the residual chemical solution according to the on-off operation of the sensor of the chemical solution storage tank and determining the replacement time of the chemical solution storage tank, controlling at least one among the chemical solution storage tank, a trap tank, the chemical solution pump, and the buffer tank, and controlling the replacement of the chemical solution storage tank. The present invention prevents the air from inflowing into an exhaust pipe in the replacement process of the chemical solution storage tank by using a lower sensor located in the lower part of the chemical solution storage tank, the chemical solution pump, and a nitrogen gas supply device. Therefore, failure for a semiconductor device is prevented. [Reference numerals] (220) Chemical solution pump;(AA) Chemical solution nozzle