ACTIVE TEMPLATE SYSTEM AND THE NANO-IMPRINT METHOD USING THE SAME

摘要

A template system and a nanoimprint method using the same are provided. The template system comprises: a substrate in which resin materials are sprayed; a template which has a nanopattern and transfers the nanopattern to the resin materials; a template chuck for supporting the template; and a pressure control device which controls the pressure of the template about the substrate according to the density of captured bubbles between the substrate and template. [Reference numerals] (140) Pressure control device;(150) Photographing device;(160) Air bubble calculation device