STRONTIUM PRECURSORS, PREPARATION METHOD THEREOF AND PROCESS FOR THE FORMATION OF THIN FILMS USING THE SAME

摘要

The present invention relates to a strontium precursor which is represented by chemical formula 1, is thermally stable, and has good volatility, thereby easily forming a thin film including good quality strontium. In chemical formula 1, each of R1, R2, R3, R4, and R5 is independently H or a C1-C10 linear or branched alkyl group; each of R6 and R7 is independently a C1-C10 linear or branched alkyl group or a C1-C10 alkyl fluoride group.