Mixed-type Chuck having member with adhesive strength based on Van der Waals' Force

摘要

PURPOSE: A combined chuck which includes a member having adsorption based on van der Waals forces is provided to prevent damage to a member to be absorbed by guiding the adsorption of the member to be absorbed using a lift pin. CONSTITUTION: A lift pin substrate(20) comprises a plurality of first lift pins and a plurality of second lift pints. The lift pin substrate is installed on a base substrate(10). An adsorption substrate(30) is installed on the lift pin substrate. The adsorption substrate forms a plurality of penetration holes in which the plurality of first lift pins and the plurality of second lift pints are inserted. A plurality of absorption members comprises adhesion based on van der Waals forces.