Detection apparatus, method of manufacturing the same, and detecting system

摘要

A detection apparatus comprising a substrate (101); a switching element (109) arranged over the substrate and including a plurality of electrodes (102, 106, 107); a conductive line (103, 108) arranged over the substrate and electrically connected to a first electrode (102, 107) of the plurality of electrodes of the switching element; and a conversion element (117) including a semiconductor layer (115, 603) arranged over the switching element and the conductive line and arranged between two electrodes (114, 116), one electrode (114) of the two electrodes being electrically connected to a second electrode (106) of the plurality of electrodes of the switching element, is provided. The one electrode of the conversion element is arranged over the switching element and the conductive line through a space (120) formed between the one electrode and the first electrode of the switching element or between the one electrode and the conductive line.